EE 507 Micro- and Nano-Fabrication Technology

Units: 4
Terms Offered: Sp

Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; pattern transfer methods.
Recommended Preparation: graduate standing in engineering, physics, or chemistry
Duplicates Credit in former EE 508
Instruction Mode: Lecture
Grading Option: Letter

Crosslisted as MASC 507