Dec 18, 2024  
USC Catalogue 2023-2024 
    
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USC Catalogue 2023-2024 [ARCHIVED CATALOGUE]

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MASC 514L Processing of Advanced Semiconductor Devices

Units: 3
Terms Offered: Fa
Statistical design of experiments, vapor deposition of thin film dielectrics, plasma etching, advanced lithography, in-situ sensors, process monitoring, quality control, assurance/reliability.
Prerequisite: EE 504 .
Instruction Mode: Lecture, Lab Required
Grading Option: Letter


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