Feb 22, 2025  
USC Catalogue 2015-2016 
    
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USC Catalogue 2015-2016 [ARCHIVED CATALOGUE]

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EE 507 Micro- and Nano-Fabrication Technology

Units: 3
Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; patterntransfer methods.
Recommended Preparation: graduate standing in engineering, physics, or chemistry.
Instruction Mode: Lecture
Grading Option: Letter


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