May 20, 2026  
USC Catalogue 2024-2025 
    
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USC Catalogue 2024-2025 [ARCHIVED CATALOGUE]

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EE 607 Microelectromechanical Systems

Units: 4
Terms Offered: FaSp
Exploration of the technology methods and physical principles of MEMS, and survey various MEMS of current interest.
Recommended Preparation: Knowledge of microfabrication, electromagnetic fields and waves, and mechanics
Instruction Mode: Lecture
Grading Option: Letter


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