Nov 29, 2024  
USC Catalogue 2018-2019 
    
USC Catalogue 2018-2019 [ARCHIVED CATALOGUE]

EE 507 Micro- and Nano-Fabrication Technology

Units: 3
Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; patterntransfer methods.
Recommended Preparation: graduate standing in engineering, physics, or chemistry
Instruction Mode: Lecture
Grading Option: Letter

Crosslisted as MASC 507