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Nov 29, 2024
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USC Catalogue 2018-2019 [ARCHIVED CATALOGUE]
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EE 507 Micro- and Nano-Fabrication Technology Units: 3 Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; patterntransfer methods. Recommended Preparation: graduate standing in engineering, physics, or chemistry Instruction Mode: Lecture Grading Option: Letter Crosslisted as MASC 507
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