Apr 20, 2024  
USC Catalogue 2018-2019 
    
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USC Catalogue 2018-2019 [ARCHIVED CATALOGUE]

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EE 508 Nano-Fabrication Lithography

Units: 3
Physical basis of lithography methods for nano-scale devices. Photon-, electron-, and ion-based systems, advanced processes; resolution enhancement techniques; directed self assembly.
Instruction Mode: Lecture
Grading Option: Letter

Crosslisted as MASC 508


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