Apr 21, 2025  
USC Catalogue 2017-2018 
    
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USC Catalogue 2017-2018 [ARCHIVED CATALOGUE]

EE 507 Micro- and Nano-Fabrication Technology

Units: 3
Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; patterntransfer methods.
Recommended Preparation: graduate standing in engineering, physics, or chemistry
Instruction Mode: Lecture
Grading Option: Letter

Crosslisted as MASC 507