May 20, 2024  
USC Catalogue 2020-2021 
    
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USC Catalogue 2020-2021 [ARCHIVED CATALOGUE]

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EE 608L Microelectromechanical Systems Laboratory

Units: 3
Terms Offered: Fa
Lab fabrication and analysis of several MEMS applications, including diaphragm-based sensors and actuators, microfluidic components, and deformable mirror array.
Instruction Mode: Lecture, Lab Required
Grading Option: Letter


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