Dec 26, 2024  
USC Catalogue 2024-2025 
    
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USC Catalogue 2024-2025
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EE 507 Micro- and Nano-Fabrication Technology

Units: 4
Terms Offered: Sp
Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; pattern transfer methods.
Recommended Preparation: graduate standing in engineering, physics, or chemistry
Duplicates Credit in former EE 508
Instruction Mode: Lecture
Grading Option: Letter

Crosslisted as MASC 507


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