Apr 25, 2024  
USC Catalogue 2018-2019 
    
USC Catalogue 2018-2019 [ARCHIVED CATALOGUE]

EE 607 Microelectromechanical Systems

Units: 3
Terms Offered: FaSp
Exploration of the technology methods and physical principles of MEMS, and survey various MEMS of current interest.
Recommended Preparation: Knowledge of microfabrication, electromagnetic fields and waves, and mechanics
Instruction Mode: Lecture
Grading Option: Letter